Specification:
|
furnace
|
Model |
TCHVWF-25-21 |
|
|
Max. Power |
25KW |
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|
Max. temperature |
2100℃ |
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|
Heating element |
High Purity Tungsten |
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Working space |
Dia60×80mm |
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Temp. Keeping method |
Tungsten, molybdenum, stainless steel heat shield |
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Chamber |
|
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Temp. controller |
EUROTHERM 3504 |
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Chamber vacuum degree (with molecular pump) |
< 5×10-4Pa （without load ,cold state） |
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Working vacuum degree |
< 5×10 -3Pa （without loading） |
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|
atmosphere Chamber inflation pressure |
＜0.05MPa |
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Pressure increasing rate |
<4Pa/hour |
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Thermocouple broken protection and display |
Yes |
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Over-temp. protection |
Yes |
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Over-current protection |
Yes |
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Underpressure protection (water pressure) |
Yes |
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Temp. Controller accuracy |
+/- 1 ℃（more than 600℃） |
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Temperature testing |
Thermocouple |
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Max. Heating rate |
< 20℃/Min |
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Water cooling |
Yes |
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|
Water chiller (optional) |
6P |
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Vacuum system |
Inlet voltage |
380V /220V |
|
|
Vacuum Bellows pipe |
KF40×1000 |
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|
Vacuum flapper valve |
KF40 |
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|
Molecular pump
（option 1）
|
Model |
TCHFJ620C |
|
|
Input voltage |
220V |
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|
Molecular pump inlet port flange |
DN160 |
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|
Molecular pump pumping rate L/S (for air) |
600 |
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|
Molecular pump ultimate pressure（Pa) |
6×10-7 |
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|
Cooling method |
Water cooling |
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|
Cooling water pressure（MPa） |
0.1-0.2 |
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|
Cooling water temp. |
<25℃ |
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Environment temp |
0~40℃ |
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Recommended starting pressure |
<10pa |
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|
Fore-line vacuum pump DRV-30
|
Power |
0.75KW |
|
|
Voltage |
380V |
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|
speed |
1450rpm |
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|
Inlet diameter |
KF25/KF40 |
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|
Foreline pump pumping rate（L/S） |
8 |
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|
Ultimate pressure |
4X10 -2Pa |
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|
Compound Vacuum Gauge (option 2)
|
Model |
ZDF |
|
|
Voltage |
220V 55W |
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|
Control accuracy |
± 1% |
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|
Vacuum degree range |
10-5 -10 5 Pa |
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