Structure 

Model

 PECVD1200-D-II-80

PECVD1200-D-II-100

Tube Furnace

  Outer tube

 Dia80X1200mm

100*1200mm

Inner tube

 Dia60X1400mm

 Dia80X1400mm

Dimension

1800X500X1200mm

1800X550X1200mm

Power

3.6 Kw

3.6Kw

Tube material

High purity Quartz Tube

Voltage

220V, 50/60Hz

Phase

Single phase

Temp. control 

·  Proportional–integral–derivative control (PID control) and auto-tune function

· 30 segments programmed with ramping, cooling and dwelling steps

· Built-in over-temperature alarm and thermocouple failure alarm

· +/- 1 ºC temperature control accuracy

SCR

106/16E from Germany

Max. Temp.

1200 ℃

Working temp.

1100 ℃

Heating rate

20 ℃/ Minute Max., suggest ≤10℃/ Min

Thermcouple

K type

Heating zone

205mm+205mm ( Two heating zones)

Surface temp.

≤45℃

Plasma RF Power Supply

Output Power: 5 -300W adjustable with ± 1% stability

RF frequency:13.56 MHz ±0.005% stability

Reflection Power:200W max.

Matching: Automatic

RF Output Port: 50 Ω, N-type, female

Noise: <50 dB.

Cooling:Air cooling.

Power:208-240VAC, 50/60Hz

Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange

TCHGX

Gas mixing  

System

MFC

Flow range

0~100 SCCM

1~200 SCCM

1~300 SCCM

1~500 SCCM

Control accuracy

±1.0%F.S

Max. Pressure

0.3MPa

Linearity

±0.5%F.S.

Repeatability

±0.2% F.S

Gas channel

   1 -8 channels

Working pressure

0.1~0.5 MPa

Working temp.

 5-45℃

Pressure gauge

-0.1~0.15MPa    0.01MPa/unit

Gas Mixing Tank

 Dia50 X 400MM

connector

 Dia6  / 1/4”

Vacuum system

Low vacuum

Power:  220V , 50/60Hz

Dimension:  650X650X600    /    650X650X300

Ultimate Vacuum degree:  10 -1Pa

Pump model: VRD-8

Pump rate: 2.2L/S

Vacuum gauge: Resistance vacuum gauge or INFICON PCG554 Anti-corrosive Pressure Gauge is optional

High vacuum

Turbo pump

Dimension 600X600X600mm

Turbo pump model:FJ620

Ultimate vacuum degree :6×10-7 Pa

Vacuum display:Compound vacuum gauge

warranty

1 year