Structure 

Model

 CVD1200S-D-II-80

CVD1200S-D-II-100

  Outer tube

 Dia80X1500mm

Dia100*1500mm

Inner tube

 Dia60X1700mm

 Dia80X1700mm

Dimension

1600X490X600mm

1600X490X600mm

Power

3.5 Kw

3.5Kw

Tube material

High purity Quartz Tube

Voltage

220V , 50/60Hz

Phase

Single phase

Temp. control 

·  Proportional–integral–derivative control (PID control) and auto-tune function

· 30 segments programmed with ramping, cooling and dwelling steps

· Built-in over-temperature alarm and thermocouple failure alarm

· +/- 1 ºC temperature control accuracy

SCR

106/16E from Germany

Max. Temp.

1200 ℃

Working temp.

1100 ℃

Heating rate

20 ℃/ Minute Max., suggest ≤10℃/ Min

Thermcouple

K type

Heating zone

440mm

Surface temp.

≤45℃

Sliding mechanism

Sliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.

Sliding speed is adjustable from  0-70 mm/S

Heating & cooling rate

In order to achieve Max.heating rate,  the user must preheat furnace to the desired temperature, then slide the furnace to the sample zone of the tube

In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone

Heating Rate:

15°C/sec (RT - 150°C);

10°C/sec (150°C - 250°C);

7°C/sec (250°C - 350°C);

4°C/sec (350°C - 500°C);

3°C/sec (350°C - 550°C);

2°C/sec (550°C - 650°C);

1°C/sec (650°C - 800°C);

0.5°C/sec (800°C - 1000°C);

Cooling Rate:

15°C/sec (1000 - 950°C);

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);

1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);

0.5°C/sec (400°C - 300°C);

TCHGX

Gas mixing  

System

MFC

Flow range

0~100 SCCM

1~200 SCCM

1~300 SCCM

1~500 SCCM

Control accuracy

±1.0%F.S

Max. Pressure

0.3MPa

Linearity

±0.5%F.S.

Repeatability

±0.2% F.S

Gas channel

   1 -8 channels

Working pressure

0.1~0.5 MPa

Working temp.

 5-45℃

Pressure gauge

-0.1~0.15MPa    0.01MPa/unit

Gas Mixing Tank

 Dia50 X 400MM

connector

 Dia6  / 1/4”

Vacuum system

Low vacuum

Power:  220V , 50/60Hz

Dimension:  650X650X600    /    650X650X300

Ultimate Vacuum degree:  10 -1Pa

Pump model: VRD-8

Pump rate: 2.2L/S

Vacuum gauge: Resistance vacuum gauge or INFICON PCG554 Anti-corrosive Pressure Gauge is optional

High vacuum

Turbo pump

Dimension 600X600X600mm

Turbo pump model:FJ620

Ultimate vacuum degree :6×10-7 Pa

Vacuum display:Compound vacuum gauge

warranty

1 year