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Structure |
Model |
CVD1400-I-60 |
CVD1400-I-80 |
CVD1400-I-100 |
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Tube furnace
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Power |
5 KW |
5KW |
6KW |
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Tube size |
Dia 60 X1000 |
Dia80X1000 |
Dia100X1000 |
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Tube material |
High purity Alumina Tube |
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Voltage |
220V, 50/60Hz |
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Phase |
Single phase |
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Heater |
SiC rods |
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Temp. control |
· Proportional–integral–derivative control (PID control) and auto-tune function · 30 segments programmed with ramping, cooling and dwelling steps · Built-in over-temperature alarm and thermocouple failure alarm · +/- 1 ºC temperature control accuracy |
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SCR |
106/16E from Germany |
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Max. Temp. |
1400 ℃ |
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Working temp. |
1300 ℃ |
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Heating rate |
20 ℃/ Minute Max., suggest ≤10℃/ Min |
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Thermcouple |
S type |
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Heating zone |
300mm |
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Surface temp. |
≤45℃ |
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TCHGX Gas mixing System
|
MFC
|
Flow range |
0~100 SCCM 1~200 SCCM 1~300 SCCM 1~500 SCCM |
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Control accuracy |
±1.0%F.S |
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Max. Pressure |
0.3MPa |
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Linearity |
±0.5%F.S. |
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Repeatability |
±0.2% F.S |
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Gas channel |
1 -8 channels |
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Working pressure |
0.1~0.5 MPa |
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Working temp. |
5-45℃ |
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Pressure gauge |
-0.1~0.15MPa 0.01MPa/unit |
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Gas Mixing Tank |
Dia50 X 400MM |
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connector |
Dia6 / 1/4” |
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Vacuum system
|
Low vacuum |
Power: 220V , 50/60Hz |
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Dimension: 650X650X600 / 650X650X300 |
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Ultimate Vacuum degree: 10 -1Pa |
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Pump model: VRD-8 Pump rate: 2.2L/S |
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Vacuum gauge: Resistance vacuum gauge or INFICON PCG554 Anti-corrosive Pressure Gauge is optional |
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High vacuum
|
Turbo pump |
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Dimension 600X600X600mm Turbo pump model:FJ620 Ultimate vacuum degree :6×10-7 Pa Vacuum display:Compound vacuum gauge |
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warranty |
1 year |
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