|
Structure |
Model |
CVD1700-I-60 |
CVD1700-I-80 |
|
|
Tube furnace
|
Power |
5 KW |
6KW |
|
|
Tube size |
Dia 60 X1000mm |
Dia80X1000mm |
||
|
Tube material |
High purity Alumina Tube |
|||
|
Voltage |
220V 380V, 50/60Hz |
|||
|
Phase |
Single phase |
|||
|
Heater |
1800 Type MoSi2 rods |
|||
|
Temp. control |
· Proportional–integral–derivative control (PID control) and auto-tune function · 30 segments programmed with ramping, cooling and dwelling steps · Built-in over-temperature alarm and thermocouple failure alarm · +/- 1 ºC temperature control accuracy |
|||
|
SCR |
106/16E from Germany |
|||
|
Max. Temp. |
1700 ℃ |
|||
|
Working temp. |
1600 ℃ |
|||
|
Heating rate |
20 ℃/ Minute Max., suggest ≤10℃/ Min |
|||
|
Thermcouple |
B type |
|||
|
Heating zone |
300mm |
|||
|
Surface temp. |
≤45℃ |
|||
|
TCHGX Gas mixing System
|
MFC
|
Flow range |
0~100 SCCM 1~200 SCCM 1~300 SCCM 1~500 SCCM |
|
|
Control accuracy |
±1.0%F.S |
|||
|
Max. Pressure |
0.3MPa |
|||
|
Linearity |
±0.5%F.S. |
|||
|
Repeatability |
±0.2% F.S |
|||
|
Gas channel |
1 -8 channels |
|||
|
Working pressure |
0.1~0.5 MPa |
|||
|
Working temp. |
5-45℃ |
|||
|
Pressure gauge |
-0.1~0.15MPa 0.01MPa/unit |
|||
|
Gas Mixing Tank |
Dia50 X 400MM |
|||
|
connector |
Dia6 / 1/4” |
|||
|
Vacuum system
|
Low vacuum |
Power: 220V , 50/60Hz |
||
|
Dimension: 650X650X600 / 650X650X300 |
||||
|
Ultimate Vacuum degree: 10 -1Pa |
||||
|
Pump model: VRD-8 Pump rate: 2.2L/S |
||||
|
Vacuum gauge: Resistance vacuum gauge or INFICON PCG554 Anti-corrosive Pressure Gauge is optional |
||||
|
High vacuum
|
Turbo pump |
|||
|
Dimension 600X600X600mm Turbo pump model:FJ620 Ultimate vacuum degree :6×10-7 Pa Vacuum display:Compound vacuum gauge |
||||
|
warranty |
1 year |
|||
Note: for special requirement, we can also design it according to your need.
