Technical parameters:
Gas channel No. : 2 ( also can be designed according to your need)
Interface: Φ 6
Display: LED
Working environment temperature: 5 ~ 45 ℃
Flow controller: proton flow controller (details technical parameters)
Ptfe tube: Φ Φ outside 6 X 4
Pressure vacuum gauge: -0.1 ~ 0.15 MPa, 0.01 MPa/grid
Cross check valve: Φ 6
Measuring range:5,10,20,30,50,100,200,300,500SCCM,1,2,3,5,10SLM (optional)
Accuracy: ± 1.5% F.S
Linear: ± 0.5 ~ 1.5% F.S
Repeat accuracy: plus or minus 0.2% F.S
Response time: 10S
Pressure drop: < 0.01 MPa
Maximum pressure: 3MP
Working environment temperature: 5 ~ 45 ℃
Input output signal: 0 ~ + 5.00 V
Power supply: + 15V 50ma-15v 50mA
Dimensions: 158 * 30 * 110
Linear: + 0.5 ~ 1.5% F.S
Repeat accuracy: plus or minus 0.2% F.S
Response time: 10S
Pressure drop: < 0.01 MPa
Maximum pressure: 3MP
Working environment temperature: 5 ~ 45 ℃
Input output signal: 0 ~ + 5.00 V
Power supply: + 15V 50ma-15v 50mA
Dimensions: 158 * 30 * 110
