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Zhengzhou TCH Instrument Co., Ltd

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+86 13526477203

500W 13.56MHz Plasma RF Generator for DIY PECVD furnace system

500W 13.56MHz Plasma RF Generator for DIY PECVD furnace system

  • The PECVD system is composed of tube furnace, quartz vacuum chamber, vacuum system, gas supply system and rf power supply system.Mainly used in: metal film, ceramic film, composite film, graphene etc.
  • It is easy to increase the function of plasma cleaning etching and etching.
  • The PECVD system has advantages of high deposition rate, good uniformity, consistency and stability.
BASIC INFO

Power output range

  0-500W

Maximum reflected power

 200W

working frequency

RF:13.56MHZ±0.005%

Pw stability

+/-0.1%

harmonic component

≤-50dbc

Rf width

0-600mm adjustable

Matching mode

 AUTO

Cooling mode

air cold

 Noise 

 <50dB

 RF interface

 50Ω   N-type

Input power

 208-240V  50/60HZ

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Company: Zhengzhou TCH Instrument Co., Ltd

Contact: Dorry

Tel: +86 13526477203

Phone: 0086 13526477203

E-mail: tchinstrumenttch@163.com

Address: No.216, Changchun Road, High-Tech Zone, Zhengzhou City, Henan Province, China (450000)

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