Super Laboratory Instruments Supplier For Material Research

Zhengzhou TCH Instrument Co., Ltd

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+86 13526477203

TCH-EZ4 Programmable Spin Coater (10000 rpm, 4" wafer Max.)

TCH-EZ4 Programmable Spin Coater (10000 rpm, 4" wafer Max.)

  • Max. speed:10000 rpm
  • sample size:<Φ4"
BASIC INFO

TCH-EZ4 spin coater is a high performance compact spin coater. It is designed for high uniformity thin material coatings. With its small footprint, the spin coater can be installed in a fume hood or a glove box. The upgraded program can store up to five recipes and each recipe could be edited with five spin steps.


 Specification:

Model

TCH-EZ4

Max Spin Speed

10,000 RPM

Speed Resolution

1 RPM

Max Spin Time

3,000 S

Time Resolution

1 S

Vacuum chucks size

10mm, 25mm, 55mm ( for standard sizes)

Max. Sample size

4 inches

Max Ramp Rate

10,000 RPM/S

Dimensions

210 mm (W) x 265mm (D) x 215mm (H)

Net weight

6Kg

Power

100-120V1 Phase200W110V

200-230V1 Phase200W220V

Required Vacuum

0.06-0.09MpaMinimum 15L/Min flow rate

Vacuum Tubing

4mm ID, 6mm OD

Fuse

2 Ainstalled)

Warranty

2 years


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Company: Zhengzhou TCH Instrument Co., Ltd

Contact: Dorry

Tel: +86 13526477203

Phone: 0086 13526477203

E-mail: tchinstrumenttch@163.com

Address: No.216, Changchun Road, High-Tech Zone, Zhengzhou City, Henan Province, China (450000)

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