VTC-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use.
Specification
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Input Power |
· Single-phase 220 VAC, 50 / 60Hz · 700 W (including vacuum pump) · For using 110 VAC, we will include a transformer for you. Please select the voltage in the Product Options |
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Output Power |
· 1600 VDC · 40 mA max |
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Vacuum Chamber |
· Vacuum chamber: 150 mm ID x 165mm OD x 150 mm H, made of high purity quartz · Sealing flange made of stainless steel with flat O-ring |
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· Stage size: 50 mm Dia. · Sputtering distance range: 25 – 40 mm adjustable · Rotatable stage with three sputtering positions (controlled by the touch screen) · The Optional Substrate heater has a maximum heating temperature of 500 °C · PID temperature controller with +/- 1 °C accuracy is integrated into the touch screen |
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Control Panel |
· 6” color touch screen with PLC integration for easy operation · Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel · Adjustment knobs on the front panel for gas intake and sputtering current control · Sputtering position, sputtering timer, and process logging are accessible from the touch screen |
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· Stainless steel shield cage is included for extra protection |
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Sputtering Targets |
· Target size requirements: 47 mm Dia. x 2.5 mm max · Three targets are included in the standard package for immediate use: · o Au target, 47 mm Dia. x 0.12 mm o Ag target, 47 mm Dia. x 0.5 mm o Cu target, 47 mm Dia. x 2.5 mm o Please contact us to see recommended coating parameter for Au & Cu Target
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Vacuum Pump |
· Built-in KF25 vacuum port for connecting to a vacuum pump (Pic #1) · Vacuum pump with KF25 connector is required, but not included. User may choose o A double stage vacuum pump for vacuum up to 1.0E-2 Torr o Or a turbopump for vacuum up to 1.0E-5 Torr · The vacuum pump can be plugged into the power outlet on the left of coater for automatic control |
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Dimensions |
· 440 mm L × 330 mm W × 455 mm H |
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Net Weight |
· 50 kg |
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Compliance |
· CE approval · NRTL certification is NOT available temporary. |
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Warranty |
· One year limited with lifetime support |
