Feature

· Specially Designed for coating conductive gold film for SEM sample

· Compact plasma sputtering coater designed for metallic coatings, such as gold, platinum, and silver

· One 2" gold (4N) target is included

Input Voltage 

· 220 VAC 50/60Hz, 200W

· < 1000 W (including vacuum pump power)

Output Voltage

· 500 VDC

Sputtering current

· 0 - 50 mA (max.) adjustable sputtering current

· Digital current meter (mA)

· Over-current protection

Sputtering time

· 1 -120 seconds adjustable

Specimen Chamber

· Quartz glass tube, 165 mm OD. x 150 mm ID x 150 mm Height

Specimen Stage

· 2" diameter

· height adjustable, 30 - 80 mm from the sample to the target

Sputtering Head

· 2" magnetron sputtering head

· One manually operated shutter for target protection

Vacuum Pressure

· Digital vacuum pressure meter (Pa)

· KF25 vacuum pump connector

· Ultimate vacuum pressure 1 Pa by the mechanical pump. The Pump is not included

Vacuum pump (optional)

· The double stage rotary vane pump is recommended. 

· Optional: you may use a turbopump to achieve 1.0E-5 Torr vacuum by a turbopump

Input gas

· One 1/4 Swagelok type tube fitting is installed for connecting the inert gas cylinder

· One metering valve is in the front panel for adjusting the input gas

Target

· One 50mm Dia. x 0.12mm gold target is included

· 4N purity gold foil: 50 mm(2 inches) Dia. x 0.12 mm (Included and pre-installed on coater) 
           

· Optional Targets are available

§ Au target (50 mm Dia. x 0.12 mm, 4N purity) 

§ Pt target (50 mm Dia. x 0.12 mm, 4N purity)  

§ Ag target (50 mm Dia. x 0.5 mm, 4N purity) 

This model is suitable for coating Gold, Silver, and platinum. It is not suitable for coating light metallic material such as Al, Mg, Zn, or Carbon target due to low energy. Please consider our high power DC/RF magnetron sputtering coater or thermal evaporation coater.

Product Dimension and weight

· 460 mm (L) × 330 mm (W) × 520 mm (H)

· 20kg

Shipping Weight & Dimension

· 80 lbs

· 45" x 45" x 40"