VTC-600-2HD-LD is a compact magnetron sputtering system with dual 2" target sources, e.g., one DC source for coating metallic film, and the other RF source for coating non-metallic material. This coating system is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc
Specification:
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Input/Output Voltage and Power |
1. Input voltage:AC220V，50Hz/60Hz 2. Total Power:<2Kw |
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Two sputtering power sources are integrated into one control box 1. DC source: 500 W power for coating metallic materials 2. RF source: 300 W power, for coating non-conductive materials Sputtering power source is optional, you can choose two DC sources, you can also choose two RF sources, or choose one DC one RF sources. |
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Magnetron Sputtering Head |
1. Two 2" Magnetron Sputtering Heads with water cooling jackets and shutters are included . 2. One is connected to DC source for coating metallic materials 3. The other one is connected to RF source for non-conductive materials 4. Target size requirement: 2" diameter 5. Target cooling mode: water cooling 6. Thickness range: 0.1 - 5 mm for both metallic and non-conductive targets (including backing plate) 7. Customized coater: Two DC heads without RF; two RF heads without DC; 3 RF heads are available upon request |
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Sample Stage |
1. Sample holder is a rotatable and heatable stage 2. Sample holder size: 140 mm Dia. for. 4" wafer max 3. Rotation speed: 1 - 20 rpm adjustable for uniform coating 4. The holder temperature is adjustable from RT to 500 °C max with accuracy ±1.0 °C via a digital temperature controller |
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Gas Flow Control |
1. Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gasses . 2. Flow rate:One flow rate is 100SCCM,the other flow rate is 200SCCM |
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Vacuum Pump Station |
Power of theVacuum Pump :300W |
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Water Chiller |
Power of the Water Chiller:350W |
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Optional |
1. Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å 2. Precision Thin Film & Coating Analysis Systems is available at extra cost 3. Various 2” oxide and metallic targets are available upon request at extra cost. |
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Overall Dimensions |
Host Dimension:500mm×560mm×660mm（20" × 22" × 26"） Total Dimension:1300mm×660mm×1200mm（52" × 26" × 48"） |
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Net Weight of Coater |
160 kg |
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Compliance |
CE approval |
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Warranty |
One year limited warranty with lifetime support |
